更新日期:2024.12.25
Model Spec. | OC1-CXN6075- S2OPAN-MH-P1-10 | OC1-CXN6050- S2OPAN-MH-P1-10 | OC1-CZLN6050- S2OPAN-MH-P1-10 | AXG6-125VMC- 2OPR-MH | AXG6-100VMC- 2OPRB-MH |
Axis | X axis (upper) | Y axis (lower) | Z axis | θx、θz | θy (Right-folded motor) |
Lead of ball screw
| 1㎜ | 1㎜ | 1㎜ | 1㎜ | 1㎜ |
Stroke | 75㎜ | 50㎜ | 50㎜ | ±4° | ±5° |
Resolution *open loop | 5μm(Full) / 2.5μm(Half) | 5μm(Full) / 2.5μm(Half) | 5μm(Full) / 2.5μm(Half) | 0.0022°(Full) / 0.0011°(Half) | 0.00275°(Full) / 0.001375°(Half) |
Maximum speed *full step | 15㎜/sec | 15㎜/sec | 20㎜/sec | 4.4°/sec | 5.4°/sec |
Positioning Accuracy *Compensation through the host system | 3μm | 3μm | 3μm | 0.03°*open loop | 0.03°*open loop |
Repeatability Accuracy *closed loop | ±0.1μm | ±0.1μm | ±0.1μm | ±0.003°*open loop | ±0.003°*open loop |
Lost Motion *closed loop | 0.1μm | 0.1μm | 0.1μm | <0.003°*open loop | <0.003°*open loop |
Load capacity *horizontal installation | 12Kgf | 12Kgf | 9Kgf | 5Kgf | 5Kgf |
Motor | PK523HPMB (high resolution) | PK523HPMB (high resolution) | PK523HPMB (high resolution) | PK523HPMB (high resolution) | PK523HPMB (high resolution) |
Optical encoder | ATOM series resolution:0.05μm | ATOM series resolution:0.05μm | ATOM series resolution:0.05μm | N/A | N/A |
※For detailed specifications, please refer to the catalog available in the download section on the official website.
Product Features
• Image-assisted initial positioning calibration.
• Motion track gauge includes area scanning, maximum light intensity search, enabling effective trajectory deviation compensation
calculations for high-precision alignment.
• High-resolution motor and optical encoder used with light intensity feedback to achieve real-time precision motion control with
high repeatability.
• High precision 6-axis modules with repeatability 0.1um.
• Available for grating coupler and edge coupler application.
• Interface integration supports machine communication, image-aided functions, coordinate system management, motion control
algorithms, 3D data, and image display, making the system user-friendly and convenient to implement.