XYZT Four-Axis Module

A dedicated solution designed for semiconductor wafer processing and inspection.
Utilizes a direct-drive motor as the primary power source, combined with a high-rigidity cross-roller guide.
• Achieves nanometer-level steady-state error and supports high-speed motion performance.
• Modular design allows flexible and customizable configurations based on customer requirements.
Widely applied in optical communication, semiconductor precision inspection, vision inspection, and micro-engineering fields, providing customers with high-precision motion component solutions.

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機型	GNTXYZT-200-200-5-30-0000			GNTXYZT-300-300-10-360-0000
軸向	XY軸	Z軸	T軸	XY軸	Z軸	T軸
負載	5 Kg			8 Kg
行程	200X200 mm	5 mm	± 15°	300X300 mm	10 mm	360°
定位精度/轉角精度	± 0.35 µm	± 0.25 µm	± 2.5 arc-sec	± 0.55 µm	± 0.35 µm	± 2.5 arc-sec
重複精度	± 0.2 µm	± 0.15 µm	± 1.5 arc-sec	± 0.2 µm	± 0.2 µm	± 1.5 arc-sec
單軸直線度	± 1.5 µm	± 1 µm	--	± 2.5 µm	± 2.5 µm	--
平面度	± 1.5 µm	± 1.5 µm	--	± 2.5 µm	--	--
正交度	15 arc-sec	--	--	15 arc-sec	--	--
連續推力/連續力矩	48.8 N	24.4 N	3 N-m	163.6 N	23 N	10 N-m
瞬時推力/瞬時力矩	340 N	170 N	10 N-m	1013.2 N	170 N	30 N-m
最大速度	800 mm/s	75 mm/s	400 rpm	800 mm/s	5 mm/s	400 rpm
最大加速度	1 g	0.7 g	450 rad/s^2	1.5 g	0.7 g	450 rad/s^2
連續電流	4.4 Arms	2.2 Arms	2.3 Arms	6.24 Arms	2.2 Arms	3 Arms
瞬時電流	30.7 Arms	15.351 Arms	6.5 Arms	38.6 Arms	15.351 Arms	18 Arms
電阻	2.6 ohm	5.2 ohm	4.4 ohm	2.4 ohm	5.2 ohm	5 ohm
電感	0.35 H	0.7 mH	5.8 mH	0.665 H	0.7 mH	10.5 mH
模組重量	35 Kg			83 Kg
光學尺類別	增量,類比	增量,類比	增量,類比	增量,類比	增量,類比	增量,類比

XYZT Four-Axis Module

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