XYZT Four-Axis Module

• An exclusive design solution of semiconductor wafer processing and inspection.
• Utilize a direct-drive motor as the primary power and optimize the stable movement in cross-roller guide with high rigidity.
• Our axis module can achieve the nanometer-level tolerance and ensure the high-speed performance.
• Modular design enables the flexible, adaptable, and various configurations based on customer requirements.
• Our axis module provides high precision motion control solutions which is widely applied in optical communication, semiconductor testing, visual inspection, and micro engineering fields.

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Model	GNTXYZT-200-200-5-30-0000			GNTXYZT-300-300-10-360-0000
Axis	XY	Z	T	XY	Z	T
Payload	5 Kg			8 kg
Stroke	200 x 200 mm	5 mm	± 15°	300 x 300 mm	10 mm	360°
Accuracy	± 0.35 µm	± 0.25 µm	± 2.5 arc-sec	± 0.55 µm	± 0.35 µm	± 2.5 arc-sec
Repeatability	± 0.2 µm	± 0.15 µm	± 1.5 arc-sec	± 0.2 µm	± 0.2 µm	± 1.5 arc-sec
Horizontal Straightness	± 1.5 µm	± 1 µm	--	± 2.5 µm	± 2.5 µm	--
Vertical Straightness	± 1.5 µm	± 1.5 µm	--	± 2.5 µm	--	--
Orthogonality	15 arc-sec	--	--	15 arc-sec	--	--
Continue Fore/Torgue	48.8 N	24.4 N	3 N	163.6 N	23 N	10 N
Peak Force/Torque	340 N	170 N	10 N	1013.2 N	170 N	30 N
Max Velocity	800 mm/s	75 mm/s	400 rpm	800 mm/s	5 mm/s	400 rpm
Max Acceleration	1 g	0.7 g	450 rad/s^2	1.5 g	0.7 g	450 rad/s^2
Current	4.4 Arms	2.2 Arms	2.3 Arms	6.24 Arms	2.2 Arms	3 Arms
Peak Current	30.7 Arms	15.351 Arms	6.5 Arms	38.6 Arms	15.351 Arms	18 Arms
Resistance	2.6 ohm	5.2 ohm	4.4 ohm	2.4 ohm	5.2 ohm	5 ohm
Inductor	0.35 H	0.7 mH	5.8 mH	0.665 H	0.7 mH	10.5 mH
Modules Weight	35 Kg			83 Kg
Encoder Type	incremental, analog	incremental, analog	incremental, analog	incremental, analog	incremental, analog	incremental, analog

XYZT Four-Axis Module

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