<span style="font-size: 12pt;">★ Light-weight and Extra-thin-It creates the wing-free thin & lighter mechanism by applying the XYθ module.</span> <br /><span style="font-size: 12pt;">★ The cross-roller bearings have been pre-loaded, to perform the whole unit high precision and rigidity.</span> <br /><span style="font-size: 12pt;">★ Hollow structure-It can be used for the optical inspection devices or conduction tester.</span> <br /><span style="font-size: 12pt;">★ Longer usage life and reliable accuracy of the Alignment stage itself is guaranteed by lubrication.</span> <br /><span style="font-size: 12pt;">★ All products are Cryogenic Treatment. It can not only significantly upgrade the toughness and operation lifetime but also improve the dimension stability of materials.</span> <br /><span style="font-size: 12pt;">★ 3D CMM- Ensure the quality and precision of the stage.</span>">
Update:2023.06.29
Model No. | GAS02-400CC-PN | GAS02-400CC-UPJ | GAS02-400RS-PN | GAS02-400RS-UPJ | GAS02-500CC-PN | GAS02-500CC-UPJ | GAS02-500RS-PN | GAS02-500RS-UPJ | GAS02-750CC-PN | GAS02-750CC-UPJ | GAS02-750RS-PN | GAS02-750RS-UPJ |
Stage Size (mm) | 400x400 | 400x400 | 400x400 | 400x400 | 500x500 | 500x500 | 500x500 | 500x500 | 750x750 | 750x750 | 750x750 | 750x750 |
Base Size (mm) | 500x500 | 500x500 | 500x500 | 500x500 | 600x600 | 600x600 | 600x600 | 600x600 | 850x850 | 850x850 | 850x850 | 850x850 |
Height (mm) | 110 | 110 | 110 | 110 | 110 | 110 | 110 | 110 | 110 | 110 | 110 | 110 |
Travel Stroke (mm) | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 | ±10x±10 |
Angle (θ)° | ±3.5° | ±3.5° | ±3.5° | ±3.5° | ±2.5° | ±2.5° | ±2.5° | ±2.5° | ±1.5° | ±1.5° | ±1.5° | ±1.5° |
Stage Material | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
Stage Surface Treatment | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
Base Material | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin | Duralumin |
Base Surface Treatment | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized | Black Anodized |
Ball Screw Spec. | Ø8-P2 | Ø8-P2 | Ø16-P2 | Ø16-P2 | Ø8-P2 | Ø8-P2 | Ø16-P2 | Ø16-P2 | Ø8-P2 | Ø8-P2 | Ø16-P2 | Ø16-P2 |
Dynamic Load Capacity (kgf) | 60 | 60 | 70 | 70 | 60 | 60 | 70 | 70 | 60 | 60 | 70 | 70 |
Static Load Capacity (kgf) | 105 | 105 | 130 | 130 | 105 | 105 | 130 | 130 | 105 | 105 | 130 | 130 |
Repeatability Accuracy (μm) | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 | ±5 | ±1 |
Parallelism (μm) | 40 | 40 | 40 | 40 | 60 | 60 | 60 | 60 | 80 | 80 | 80 | 80 |
Motor Brand | GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental | GMT | Oriental |
Motor Type | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper | 2-Phase Stepper | 5-Phase Stepper |
Motor Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft | □42 Double Shaft |
Motor Model. No. | 2MS- N42D47 A | PKP544 N18B | 2MS- N42D47 A | PKP544 N18B | 2MS- N42D47 A | PKP544 N18B | 2MS- N42D47 A | PKP544 N18B | 2MS- N42D47 A | PKP544 N18B | 2MS- N42D47 A | PKP544 N18B |
Driver Brand | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental | Contact us | Oriental |
Driver Model. No. | Contact us | CVD518 -K | Contact us | CVD518 -K | Contact us | CVD518 -K | Contact us | CVD518 -K | Contact us | CVD518 -K | Contact us | CVD518 -K |
Characteristics |
♦ Ultra thin appearance Achieved with the lighted crossed roller bearings and modularized structures. ♦ High stiffness and high precision Applying preload operations on every roller bearings of stages for better rigidity and precision. ♦ Hollow structure Lightweight structure of the stages could be suitable for optical inspection devices. ♦ Lubrication system Well lubricating gives the stages longer using life and reliable accuracy. ♦ Genericity Available sizes from 160mm to 1500mm, even capable of heightening load resistance by adding driven modules. |
Applications |
♦ Panel lamination machinery ♦ Panel film laminating machines ♦ Print screen and 3D printing ♦ Angular glass cutting and grinding equipment ♦ Wafe alignment equipment ♦ P.C.D exposure equipment ♦ Software cutting equipment ♦ Semi-conductor equipment |
Structures and Lubrication System |
Transmission Theory |