Update:2023.06.29
Model No.
GAS03-1000CC-PN
GAS03-1000CC-UPJ
GAS03-1000RS-PN
GAS03-1000RS-UPJ
GAS03-1500CC-PN
GAS03-1500CC-UPJ
GAS03-1500RS-PN
GAS03-1500RS-UPJ
Stage Size (mm)
1000x1000
1500x1500
Base Size (mm)
1200x1200
Height (mm)
Travel Stroke (mm)
Angle (θ)°
Stage Material
Stage Surface Treatment
Base Material
Base Surface Treatment
Ball Screw Spec.
Dynamic Load Capacity (kgf)
Static Load Capacity (kgf)
Repeatability Accuracy (μm)
Parallelism (μm)
Motor Brand
Motor Type
Motor Shaft
Motor Model. No.
2MS-
N57D41A
PKP564
FN24BW
Driver Brand
Driver Model. No.
Contact us
CVD524-K
♦ Ultra thin appearance
Achieved with the lighted crossed roller bearings and modularized structures.
♦ High stiffness and high precision
Applying preload operations on every roller bearings of stages for better rigidity and precision.
♦ Hollow structure
Lightweight structure of the stages could be suitable for optical inspection devices.
♦ Lubrication system
Well lubricating gives the stages longer using life and reliable accuracy.
♦ Genericity
Available sizes from 160mm to 1500mm, even capable of heightening load resistance by adding driven modules.
♦ Panel lamination machinery
♦ Panel film laminating machines
♦ Print screen and 3D printing
♦ Angular glass cutting and grinding equipment
♦ Wafe alignment equipment
♦ P.C.D exposure equipment
♦ Software cutting equipment
♦ Semi-conductor equipment