<span style="font-size: 12pt;">★ It is consisted XYZ manual positioning stage and a tilt stage (θx, θy). It is a 5-axis high resolution positioning stage to be designed to perform the single-fiber positioning.</span> <br /><span style="font-size: 12pt;">★ Available potion with ordering code - M5E-2000B-L-[XYZ module: MXYZ60-ACSL、Tilt module: MTR60-45L]</span>">
Update:2022.7.20
Model No. | M5E-2000B-L | ||||||
Specification | Axis | X | Y | Z | θx | θy | |
Travel Stroke | Rough Tuning | ± 6.5 mm | ± 6.5 mm | ± 6.5 mm | ± 3 ° | ± 3 ° | |
Fine Tuning | ± 0.3 mm | ± 0.3 mm | ± 0.3 mm | ||||
Accuracy | Rough Tuning | 10 μm | 10 μm | 10 μm | ≒ 29.3" / Vernier | ≒ 27.8" / Vernier | |
Fine Tuning | 0.5 μm | 0.5 μm | 0.5 μm |
Feed Position |
Characterisitc of Different Guiding Type |
The Main Feeding Mode of Mini Stages |