A6E-6701S

X

Y

Z

θx

θy

θz

CXN8050-S2OPBN

AZ7010-S6OPR

CXN8050-S2OPBN

AXG6-100VMC-2OPR

AXG4-40VM-2P-R

AXG6-75VMC-2OPR

CXN8050-S2OPBN

AZ7010 -S6OPR

CXN8050-S2OPBN

AXG6-100VMC-2OPL

AXG4-40VM-2P-L

AXG6-75VMC-2OPL

50mm

10mm

50mm

±5°

±8.2°

±6°

1mm

1mm(斜率1:2)

1mm

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

N/A

PKP544MN18B

PKP544MN18B

PKP544MN18B

PK523HPMB

PK523HPMB

PK523HPMB

1μm(Full)

0.5μm(Full)

1μm(Full)

0.0005°(Full)

0.00125°(Full)

0.00071°(Full)

5μm

5μm

5μm

0.03°

0.03°

0.03°

±0.5μm

±0.5μm

±0.5μm

±0.003°

±0.003°

±0.003°